Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2005-02-16
2008-10-21
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C438S401000, C257S797000
Reexamination Certificate
active
07440105
ABSTRACT:
The present invention relates to overlay marks and methods for determining overlay error. One aspect of the present invention relates to a continuously varying offset mark. The continuously varying offset mark is a single mark that includes over laid periodic structures, which have offsets that vary as a function of position. By way of example, the periodic structures may correspond to gratings with different values of a grating characteristic such as pitch. Another aspect of the present invention relates to methods for determining overlay error from the continuously varying offset mark. The method generally includes determining the center of symmetry of the continuously varying offset mark and comparing it to the geometric center of the mark. If there is zero overlay, the center of symmetry tends to coincide with the geometric center of the mark. If overlay is non zero (e.g., misalignment between two layers), the center of symmetry is displaced from the geometric center of the mark. The displacement in conjunction with the preset gain of the continuously varying offset mark is used to calculate the overlay error.
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Adel Michael E.
Kandel Daniel
Seligson Joel L.
KLA-Tencor Technologies Corporation
Stock, Jr. Gordon J
Toatley , Jr. Gregory J.
Weaver Austin Villeneuve & Sampson LLP
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