Cross-mask holder device

Details Cross-mask holder device Cross-mask holder device

1987-09-18

1988-12-13

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

350566, G01B 1100

Patent

active

047906618

ABSTRACT:
A cross-mask and cross-mask holder with improved adjustment means. A cross-mask holder allows adjustment of a cross-mask in the x, y and theta directions. The cross-mask may be adjusted in the x and the y directions through use of screws on the side of the holder and may be adjusted in the theta direction by turning a tube which contains the cross-mask. The invention further discloses the use of an umbrella and cover assembly to reduce light source background noise which improves the alignment signal on an oscilloscope during processing of semiconductor wafers in a stepper machine.

REFERENCES:
patent: 3927480 (1975-12-01), Robertsson
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4452526 (1984-06-01), Johannsmeier et al.

Affiliated with

Also associated with

Rating

Cross-mask holder device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cross-mask holder device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cross-mask holder device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2193871