Light-beam scanning device
Light-beam scanning device
Low reset voltage process for DMD
Low surface energy passivation layer for micromechanical devices
Lubricating micro-machined devices using fluorosurfactants
Lubricating micro-machined devices using fluorosurfactants
Magnet on frame oscillating device
Magnetically actuated microelectrochemical systems actuator
Magnetically-packaged optical MEMs device
Manufacturing a mirror plate or other operational structure...
Membrane device with recessed electrodes and method of making
MEMS device
MEMS device and method of forming MEMS device
MEMS device and optical switch
MEMS device having a drive coil with curved segments
MEMS devices with stiction bumps
MEMS mirror
MEMS mirror driven by one motion with oscillations of...
MEMS mirror with rotation amplification and electromagnetic...
Method and apparatus for movably supporting a reflecting member