MEMS mirror

Details MEMS mirror MEMS mirror

2005-08-23

2005-08-23

Epps, Georgia (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S295000, C348S205000

Reexamination Certificate

active

06934063

ABSTRACT:
A MEMS mirror and method for fabricating the mirror is provided. The mirror has a plurality of structures that operatively rotate around a support structure. The mirror is fabricated, such that the silicon components are separated from a glass structure having electrodes to prevent shorting of the electrodes to the mirror. Additionally, the electrodes are positioned such that providing electrical contact is eased.

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