MEMS mirror with rotation amplification and electromagnetic...

Details MEMS mirror with rotation amplification and electromagnetic... MEMS mirror with rotation amplification and electromagnetic...

2007-12-05

2010-10-26

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07821693

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

REFERENCES:
patent: 6735004 (2004-05-01), Hagelin et al.
patent: 7095156 (2006-08-01), Yoda
patent: 7382510 (2008-06-01), Yoda
patent: 1528422 (2005-05-01), None
patent: 2006269186 (1994-09-01), None
patent: 2005181394 (2005-07-01), None
M. Yoda et al., “A MEMS 1-D Optical Scanner for Laser Projection Display using Self-assembled Vertical Combs and Scan-angle Magnifying Mechanism,” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, Jun. 5-9, 2005, pp. 968-971.
PCT International Search Report and Written Opinion of the International Searching Authority, 12 pages.

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