Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2007-11-04
2010-06-15
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S237000, C359S290000
Reexamination Certificate
active
07738154
ABSTRACT:
A method of lubricating MEMS devices using fluorosurfactants42. Micro-machined devices, such as a digital micro-mirror device (DMD™)940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants42, which consists of a hydrophilic chain40attached to a hydrophobic fluorocarbon tail41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.
REFERENCES:
patent: 3790080 (1974-02-01), Babington
patent: 4224173 (1980-09-01), Reick
patent: 6028690 (2000-02-01), Carter et al.
patent: 7291363 (2007-11-01), Miller
patent: 2002/0122894 (2002-09-01), Brenner et al.
Brady III Wade James
Brill Charles A.
Pinkney Dawayne A
Sugarman Scott J
Telecky , Jr. Frederick J.
LandOfFree
Lubricating micro-machined devices using fluorosurfactants does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lubricating micro-machined devices using fluorosurfactants, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lubricating micro-machined devices using fluorosurfactants will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4246672