Lubricating micro-machined devices using fluorosurfactants

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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C359S237000, C359S290000

Reexamination Certificate

active

07738154

ABSTRACT:
A method of lubricating MEMS devices using fluorosurfactants42. Micro-machined devices, such as a digital micro-mirror device (DMD™)940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants42, which consists of a hydrophilic chain40attached to a hydrophobic fluorocarbon tail41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.

REFERENCES:
patent: 3790080 (1974-02-01), Babington
patent: 4224173 (1980-09-01), Reick
patent: 6028690 (2000-02-01), Carter et al.
patent: 7291363 (2007-11-01), Miller
patent: 2002/0122894 (2002-09-01), Brenner et al.

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