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Tensile-stressed microelectromechanical apparatus and...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Thin film actuated mirror array

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Thin film actuated mirror array and a method for the manufacture

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Thin film actuated mirror array and method of manufacturing the

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tiltable-body apparatus, and method of fabricating the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tiltable-body apparatus, and method of fabricating the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tiltable-body apparatus, and method of fabricating the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tiltable-body apparatus, and method of fabricating the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tiltable-body apparatus, and method of fabricating the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Tip-tilt-piston actuator

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Torsional hinged mirror assembly with central spines and...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Torsional micro-mechanical mirror system

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Torsional rocker

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Torsional vibrators and light deflectors using the torsional vib

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Torsionally hinged devices with support anchors

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Two axis low inertia torsional hinged optical device

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Two frequency resonantly excited MEMS mirror for diode-laser...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Two-dimensional free-space optical wavelength routing...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Two-dimensional free-space optical wavelength routing...

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Two-dimensional stepwise-controlled microstructure

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