Magnet on frame oscillating device

Magnetically actuated microelectrochemical systems actuator

Magnetically-packaged optical MEMs device

Manufacturing a mirror plate or other operational structure...

Membrane device with recessed electrodes and method of making

MEMS device

MEMS device and method of forming MEMS device

MEMS device and optical switch

MEMS device having a drive coil with curved segments

MEMS devices with stiction bumps

MEMS mirror

MEMS mirror driven by one motion with oscillations of...

MEMS mirror with rotation amplification and electromagnetic...

Method and apparatus for movably supporting a reflecting member

Method and apparatus for optical code reading using a MEM optica

Method and apparatus for steering light

Method and device for modulating light with optical...

Method for fabricating a DMD spatial light modulator with a hard

Method for manufacturing a micromechanical device

Method for manufacturing an electrodisplacive actuated mirror ar