MEMS device having a drive coil with curved segments

Details MEMS device having a drive coil with curved segments MEMS device having a drive coil with curved segments

2007-04-26

2009-11-10

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07616366

ABSTRACT:
Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear segments. One or more of the non-linear segments may be curved to increase a responsiveness of the coil to the magnetic field in which the coil is operating to provide an increased torque on the rotation of the mirror of the MEMS device in response to a drive signal applied to the coil in the presence of the magnetic field. The non-linear coil may have other shapes and may be any arbitrary shape.

REFERENCES:
patent: 4000397 (1976-12-01), Hebert et al.
patent: 4020357 (1977-04-01), Punis
patent: 4091379 (1978-05-01), Wu et al.
patent: 4158435 (1979-06-01), Nakanishi et al.
patent: 4335301 (1982-06-01), Palmer et al.
patent: 4528444 (1985-07-01), Hara et al.
patent: 4740675 (1988-04-01), Brosnan et al.
patent: 4749879 (1988-06-01), Peterson et al.
patent: 4777357 (1988-10-01), Harada et al.
patent: 4782219 (1988-11-01), Crater
patent: 4798943 (1989-01-01), Cherry
patent: 4933538 (1990-06-01), Heiman et al.
patent: 5272323 (1993-12-01), Martino
patent: 5302813 (1994-04-01), Goren
patent: 5408081 (1995-04-01), Barkan
patent: 5436440 (1995-07-01), Barkan
patent: 5446272 (1995-08-01), Barkan
patent: 5449893 (1995-09-01), Bridgelall et al.
patent: 5463211 (1995-10-01), Arends et al.
patent: 5475208 (1995-12-01), Marom
patent: 5545888 (1996-08-01), Barkan et al.
patent: 5557094 (1996-09-01), Barkan
patent: 5581072 (1996-12-01), Bridgelall et al.
patent: 5606447 (1997-02-01), Asada et al.
patent: 5612531 (1997-03-01), Barkan et al.
patent: 5705799 (1998-01-01), Li
patent: 5811782 (1998-09-01), Sato et al.
patent: 5852286 (1998-12-01), Coleman
patent: 5923023 (1999-07-01), Arends et al.
patent: 5925868 (1999-07-01), Arends et al.
patent: 5949054 (1999-09-01), Karpen et al.
patent: 6000616 (1999-12-01), Spitz
patent: 6073849 (2000-06-01), Colley et al.
patent: 6155490 (2000-12-01), Ackley
patent: 6189794 (2001-02-01), Iwaguchi et al.
patent: 6343741 (2002-02-01), Arends et al.
patent: 6382511 (2002-05-01), Tang et al.
patent: 6388789 (2002-05-01), Bernstein
patent: 6502751 (2003-01-01), Tang
patent: 6874688 (2005-04-01), Barkan et al.
patent: 6938824 (2005-09-01), Madej et al.
patent: 7221247 (2007-05-01), Levitan et al.
patent: 2006/0108425 (2006-05-01), Wiklof
patent: 2007/0296532 (2007-12-01), Ko et al.

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