Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent
1996-04-19
1998-06-30
Dzierzynski, Paul M.
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
359295, 359900, 257414, 257415, 385 16, 385 40, 385 50, G02B 2608, G02B 626, H01L 2714, H01L 2982
Patent
active
057742529
ABSTRACT:
A membrane device is provided in which a plurality of ridges (14) and recesses (16) are formed proximate to a substrate (12). Electrodes (18) are formed within the recesses (16). A spacer (20) supports a membrane (22). Application of a potential difference between the membrane (22) and the electrodes (18) allows for deflection of the membrane (22) toward the electrodes (18).
REFERENCES:
patent: 4113360 (1978-09-01), Baur et al.
patent: 4441791 (1984-04-01), Hornbeck
patent: 4862124 (1989-08-01), Rando
patent: 5158506 (1992-10-01), McDonald
patent: 5178728 (1993-01-01), Boysel et al.
patent: 5223971 (1993-06-01), Magel
patent: 5231153 (1993-07-01), Magel et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5367585 (1994-11-01), Ghezzo et al.
Boysel Robert M.
Lin Tsen-Hwang
Magel Gregory A.
Wu Wen R.
Donaldson Richard L.
Dzierzynski Paul M.
Jr. John Juba
Kesterson James C.
Reed Julie L.
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