Low surface energy passivation layer for micromechanical devices

Details Low surface energy passivation layer for micromechanical devices Low surface energy passivation layer for micromechanical devices

1994-02-04

1997-02-11

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359230, 348771, 310 40MM, G02B 2608, G02B 2602

Patent

active

056026714

ABSTRACT:
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed on a surface of a micromechanical device. When the surface comes in contact with another surface, the oriented monolayer decreases the Van der Waals forces to reduce the attraction between the surfaces.

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