MEMS devices with stiction bumps

Details MEMS devices with stiction bumps MEMS devices with stiction bumps

2006-07-24

2009-06-30

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S290000, C359S291000, C359S295000, C359S298000, C359S847000, C359S848000, C359S849000, C345S085000, C345S108000, C348S750000, C348S755000, C348S770000, C348S771000

Reexamination Certificate

active

07554711

ABSTRACT:
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

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