Low reset voltage process for DMD

Details Low reset voltage process for DMD Low reset voltage process for DMD

1992-01-16

1994-07-19

Arnold, Bruce Y.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359230, 348771, G02B 2602

Patent

active

053314549

ABSTRACT:
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed upon the landing electrode (10) of a spatial light modulator element. When the element is activated and deflects to come in contact with the landing electrode, the oriented monolayer decreases the Van der Waals forces and prevents the element from sticking to the electrode.

REFERENCES:
patent: 5096279 (1992-03-01), Hornbeck et al.
Levine, O. and Zisman, W. A. "Physical Properties of Monolayers Adsorbed at the Solid-Air Interface, I" Journal of Physical Chemistry, vol. 61, Aug. 1957 pp. 1068-1077.
Levine, O. and Zisman, W. A. "Physical Properties of Monolayers Adsorbed at the Solid-Air Interface, II." Journal of Physical Chemistry, vol. 61, Sep. 1957, pp. 1186-1195.

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