MEMS device and optical switch

Details MEMS device and optical switch MEMS device and optical switch

2009-07-10

2010-12-07

Dinh, Jack (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S290000, C359S291000, C359S295000, C385S017000, C385S018000

Reexamination Certificate

active

07847995

ABSTRACT:
A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

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Written Opinion of the International Searching Authority, Form PCT/ISA/237, mailed May 22, 2007, in corresponding International Application No. PCT/JP2007/052977.
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Notification of Transmittal of Translation of the International Preliminary Report on Patentability, Form PCT/IB/338, mailed Aug. 27, 2009, in corresponding International Application No. PCT/JP2007/052977.
International Preliminary Report on Patentability, Form PCT/IB/373, issued Aug. 19, 2009, in corresponding International Application No. PCT/JP2007/052977.

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