Loadlock designs and methods for using same

Local store for a wafer processing station

Lock and elevator arrangement for loading workpieces into the wo

Lock for the loading and/or discharging of bulk materials

Lock for the transport of bulk material

Long arm manipulator for standard mechanical interface apparatus

Low shock transmissive antechamber seal mechanisms for vacuum ch

Machine and method for manufacturing compact discs

Magnetically coupled linear delivery system transferring...

Magnetically coupled wafer extraction platform

Manipulator for standard mechanical interface apparatus

Mask cassette and mask cassette loading device

Material transport system

Mechanical interface apparatus

Method and apparatus for air guidance in a processing chamber

Method and apparatus for batch processing of wafers in a...

Method and apparatus for continuous throughput in a vacuum envir

Method and apparatus for handling and processing wafer-like mate

Method and apparatus for handling and processing wafer-like mate

Method and apparatus for loading objects into evacuated treating