Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1996-11-08
2000-11-28
Bratlie, Steven A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414939, 414940, B65G 4907
Patent
active
06152669&
ABSTRACT:
A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the semiconductor wafers due to exposure to external air or dust. When a sealed container 100 is placed on top of a processing apparatus 200, latch mechanisms 201 are activated to engage with a flange 103, so as to affix the container body 101. Then, valves 3 and 5 are opened to perform a gas purge, after which a drive mechanism provided inside a lock operating mechanism 220 is operated in order to withdraw lock arms 111 from concave portions 103a, thereby unlocking the bottom lid 110. Then, wafer cassettes 106 inside the container are lowered to a predetermined position by means of an in-apparatus elevator mechanism 202, and the wafer cassettes are loaded into the processing apparatus 200 by a cassette loading mechanism.
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Kawano Hitoshi
Morita Teruya
Murata Masanao
Oyobe Hiroyuki
Takaoka Toshiyuki
Bratlie Steven A.
Shinko Electric Co. Ltd.
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