Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1989-01-11
1990-07-31
Bucci, David A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414331, 432 10, 432223, H01L 2130
Patent
active
049446452
ABSTRACT:
In a method and apparatus for depicting a circuit pattern on an article such as a semiconductor wafer, glass mask or a reticle supported by a stage in an evacuated casing with an electron beam, the article is disposed in a magazine contained in a sealable chamber communicated with the evacuated chamber. The article is contacted with a heat adjusting member to adjust the temperature thereof. After matching the level of the article with that of the stage, the article is loaded on the stage.
REFERENCES:
patent: 3407097 (1968-10-01), Engelhard
patent: 3521765 (1970-07-01), Kasuffman et al.
patent: 3656454 (1972-04-01), Schroder
patent: 3756067 (1973-09-01), Cushman
patent: 4487675 (1984-12-01), Meckel
patent: 4498833 (1985-02-01), Hertel
patent: 4506455 (1985-03-01), Rossi
patent: 4529869 (1985-07-01), Ekstrom, Jr.
patent: 4565601 (1986-01-01), Kakehi et al.
patent: 4664578 (1987-05-01), Kakehi
IEEE Transactions on Electron Devices, vol. ED-16, No. 9, Sep. 1979, pp. 1299-1305, Yau, Leopoldo D., "Process-Induced Distortion in Silicon Wafers".
Bucci David A.
Toshiba Kikai Kabushiki Kaisha
LandOfFree
Method and apparatus for loading objects into evacuated treating does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for loading objects into evacuated treating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for loading objects into evacuated treating will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1395958