Material or article handling – Apparatus for moving material between zones having different... – Including trap chamber having horizontal axis of rotation
Patent
1987-04-27
1989-03-14
Niebling, John F.
Material or article handling
Apparatus for moving material between zones having different...
Including trap chamber having horizontal axis of rotation
414217, 414786, 384 10, 384 15, 277DIG7, 204298, B65G 6500
Patent
active
048121010
ABSTRACT:
Disclosed is a method and apparatus for continuous introduction and exit of workpieces into and out of a vacuum. A first seal is provided between the atmosphere and a first pumping station. This seal comprises compliant members positioned within cavities in a plate so that the pressure differential causes the members to push against the workpiece and the cavity wall to establish a rotating seal. A second seal may also be provided between the first pumping station and the vacuum chabmer. This seal includes compliant members mounted within a series of differentially pumped cavities and providing a low friction seal with the workpiece.
REFERENCES:
patent: 3692272 (1972-09-01), Radke
patent: 4249846 (1981-02-01), Worsham
patent: 4266111 (1981-05-01), Trillwood
patent: 4398728 (1983-08-01), Sukegawa et al.
patent: 4501428 (1985-02-01), Ueno et al.
George Carroll H.
Lynott Guy W.
Pargellis Andrew N.
American Telephone and Telegraph Company AT&T Bell Laboratories
Birnbaum Lester H.
Marquis Steven P.
Niebling John F.
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