Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1988-07-20
1990-03-20
Bucci, David A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414225, 414786, B65G 6500
Patent
active
049096958
ABSTRACT:
The apparatus is provided with a main chamber divided into two chamber halves by a rotatable index plate. The plate rotates through a load lock station, through which wafer-like articles are inserted into and removed from the main chamber, and a series of processing stations, at each of which a process such as etching or sputter coating can be performed simultaneously upon different objects and sequentially upon the same objects. Each processing chamber is isolatable from the main chamber and other processing chambers during processing so that different substrates can be processed simultaneously at the various stations using different processes without cross contamination. Substrate holders resiliently mounted on the plate move transversely when compressed between a cup shaped back-plane device and the main chamber wall to separately seal each of the processing chambers from the main chamber.
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Article: from Semiconductor World, 1986, pp. 85-91.
Brochure: CIT Alcatel Model GIR-200, 10 pages, undated.
Biehl Richard E.
Eror Miroslav
Hurwitt Steven D.
Bucci David A.
Materials Research Corporation
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