Mask cassette and mask cassette loading device

Details Mask cassette and mask cassette loading device Mask cassette and mask cassette loading device

1989-09-05

1991-06-25

Westin, Edward P.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414222, 414331, 378 34, 378 35, 378204, B65G 6530, B65H 100, G21K 500

Patent

active

050262394

ABSTRACT:
A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern of the mask on the wafer, are disclosed. The mask cassette includes a base for accommodating a plurality masks and a cover which can be separated from and coupled to the base only in one direction. When the two are coupled by a locking mechanism, the cassette can be completely closed against atmospheric pressure. The mask cassette loading device includes a common mechanism which serves to release the locking mechanism of the cassette and also, to move the cassette base relative to the cover. Thus, with a simple and compact structure, the protection and replacement of X-ray masks are ensured with certainty.

REFERENCES:
patent: 4815912 (1989-03-01), Maney et al.
DeGennaro, et al. "Clean Environment Handling System," IBM Technical Disclosure Bulletin, vol. 13, No. 3, 8/1970, pp. 627 through 628.

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