Long arm manipulator for standard mechanical interface apparatus

Details Long arm manipulator for standard mechanical interface apparatus Long arm manipulator for standard mechanical interface apparatus

1985-08-26

1987-06-30

Spar, Robert J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414608, 414618, 414733, 414742, B65G 6500

Patent

active

046767096

ABSTRACT:
Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station and has a removeable door on which the cassette is supportable. A first platform is transportable along a shaft below the interface port and is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. A second platform mounted in the shaft includes a manipulator arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The manipulator arm then pivots to transport the cassette to a location in the processing station away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The manipulator arm and the second platform after placing the cassette at a location in the processing station away from the shaft, are then positioned completely inside the shaft to minimize the space taken up in the processing station by the manipulator.

REFERENCES:
patent: 2914203 (1959-11-01), Gafner
patent: 3187917 (1965-06-01), Miller
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4343584 (1982-08-01), Hudgins
patent: 4366423 (1982-12-01), Inaba et al.
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4518298 (1985-05-01), Yasukawa
patent: 4532970 (1985-08-01), Tullis et al.

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