Loadlock designs and methods for using same

Details Loadlock designs and methods for using same Loadlock designs and methods for using same

2007-11-30

2011-10-11

Lowe, Scott (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000, C414S935000

Reexamination Certificate

active

08033769

ABSTRACT:
Provided are apparatuses and methods disclosed for wafer processing. Specific embodiments include dual wafer handling systems that transfer wafers from storage cassettes to processing modules and back and aspects thereof. Stacked independent loadlocks that allow venting and pumping operations to work in parallel and may be optimized for particle reduction are provided. Also provided are annular designs for radial top down flow during loadlock vent and pumpdown.

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