Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2005-12-06
2005-12-06
Dillon, Jr., Joe (Department: 3651)
Material or article handling
Apparatus for moving material between zones having different...
C198S619000, C414S939000
Reexamination Certificate
active
06971832
ABSTRACT:
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The trolley is magnetically coupled to an external mechanical drive through a vacuum wall of the vacuum chamber which drives the wafer on the paddle into an attached processing chamber. A single wafer may be loaded onto the paddle through a door in the vacuum wall. Alternatively, a cassette of wafers may be loaded into a cassette station opposite the processing chamber. One end of the paddle removes a wafer from the cassette, and a hand off station moves the wafer to a second end of the paddle, which then moves it into the processing chamber.
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Ackeret Michael A.
Lunday Andrew P.
Dillon, Jr. Joe
Guenzer Charles S.
Transfer Engineering and Manufacturing, Inc.
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