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High speed movement of workpieces in vacuum processing

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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High speed wafer handler

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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High vacuum dual stage load lock and method for loading and unlo

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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High vacuum dual stage load lock and method for loading and...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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