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Batchloader for load lock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Bellows isolation for index platforms

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Box door actuated retainer

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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