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Fabrication system with extensible equipment sets

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Factory automation apparatus and method for handling, moving and

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Fast swap dual substrate transport for load lock

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Fast swap dual substrate transport for load lock

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Fast swap dual substrate transport for load lock

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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FIMS interface without alignment pins

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Front end vacuum processing environment

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Front end wafer staging with wafer cassette turntables and on-th

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Front-opening unified pod closing/opening control structure

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Fully automated and computerized conveyor based manufacturing li

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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