Light actuating force elevator drive mechanism

Linear pocket letdown device

Linear substrate transport apparatus

Liquid seal lock hoppers and method of utilizing same

Load arm for load lock

Load lock chamber for large area substrate processing system

Load lock with vertically movable support

Load port

Load port opener

Load port, semiconductor manufacturing apparatus,...

Load port, wafer processing apparatus, and method of...

Load-lock and semiconductor device manufacturing equipment...

Load-lock unit and wafer transfer system

Load-lock unit and wafer transfer system

Load-lock unit and wafer transfer system

Loading and unloading airlock apparatus for a vacuum treatment c

Loading and unloading station for semiconductor processing...

Loading apparatus for a work chamber

Loading apparatus having a suction-hold mechanism

Loadlock apparatus and structure for creating a seal between...