Load-lock unit and wafer transfer system

Details Load-lock unit and wafer transfer system Load-lock unit and wafer transfer system

1994-08-23

1995-07-25

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414936, 414939, 414754, 364559, 118719, B65G 106

Patent

active

054356830

ABSTRACT:
A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a holding mechanism, disposed in the load-lock chamber for holding the wafer, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting mechanism for detecting a positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.

REFERENCES:
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patent: 4752898 (1988-06-01), Koenig
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patent: 4973217 (1990-11-01), Engelbrecht
patent: 5054991 (1991-10-01), Kato
patent: 5102280 (1992-04-01), Poduje
patent: 5340261 (1994-08-01), Oosawa et al.

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