Light actuating force elevator drive mechanism

Details Light actuating force elevator drive mechanism Light actuating force elevator drive mechanism

1980-12-24

1983-05-10

Sheridan, Robert G.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

187 17, H01J 3720

Patent

active

043827390

ABSTRACT:
An elevator drive shaft is air pressure counter-balanced and dampened under varying load and system pressure conditions by applying required air pressure to an appropriate side of a piston moving with the drive shaft in an electron beam semiconductor wafer writing apparatus vacuum chamber. Air pressure counterbalancing load forces minimize the actuating forces required to drive the elevator, substantially minimizing vibratory shock and distortion to the electron beam writing system and increasing speed of wafer movement. This permits electron beam writing on one wafer simultaneously with a load/unload operation of a second semiconductor wafer. The counter-balancing load forces also minimize the probability of accidental damage to the system or semiconductor wafers due to uncontrolled high forces or upon mechanical impact between moving and fixed parts, during apparatus malfunction.

REFERENCES:
patent: 1136140 (1915-04-01), Jansson
patent: 3968885 (1976-07-01), Hassan et al.

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