Load port, semiconductor manufacturing apparatus,...

Details Load port, semiconductor manufacturing apparatus,... Load port, semiconductor manufacturing apparatus,...

2006-03-14

2006-03-14

Brahan, Thomas J. (Department: 3654)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S331030, C414S937000

Reexamination Certificate

active

07011483

ABSTRACT:
A load port includes an adapter-detecting sensor arranged at an upper portion of an opener. When the opener opens a lid of a FOUP, the adapter-detecting sensor detects whether a wafer adapter is mounted in the FOUP, and notifies a control unit of a semiconductor manufacturing apparatus of the result of the detection. The control unit determines the size of semiconductor wafers based on the result of the detection and carries out processing operation dependent on the size of the wafers in a processing chamber.

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