Loadlock apparatus and structure for creating a seal between...

Details Loadlock apparatus and structure for creating a seal between... Loadlock apparatus and structure for creating a seal between...

2006-02-21

2006-02-21

Krizek, Janice L. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S217100, C414S939000

Reexamination Certificate

active

07001129

ABSTRACT:
Sealing structure for use in creating a seal between an elevator drive shaft and a loadlock chamber includes a base fastened over a hole in the bottom wall of the loadlock chamber, a fixed member fastened to an upper part of the base, a seal housing spaced above the fixed member, a cap in the form of a flexible bellows having a first end adhered to an upper surface of the fixed member and a second end adhered to a lower surface of the seal housing, one or more support shafts having upper and lower ends pivotally connected to the seal housing and the fixed member outside the cap, a seal seated in the seal housing and having an inner circumferential surface contacting the outer circumferential surface of the elevator drive shaft, and a seal cover fixed to an upper part of the seal housing. According to the present invention, uniform pressure is maintained between the shaft and the seal during assembly and operation of the apparatus. Thus, a seal is always maintained between the elevator drive shaft and the bottom wall of the loadlock chamber.

REFERENCES:
patent: 4724621 (1988-02-01), Hobson et al.
patent: 5224999 (1993-07-01), Shiraiwa et al.
patent: 6311983 (2001-11-01), Burcham
patent: 4210110 (1992-03-01), None
patent: 11354615 (1999-12-01), None
patent: 01/20663 (2001-03-01), None

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