Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2006-05-25
2008-11-18
Rodriguez, Saul J. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
Reexamination Certificate
active
07452174
ABSTRACT:
A load-lock and semiconductor device manufacturing equipment have a wafer anti-contamination measure capable of maximizing production yield. The load-lock includes a chamber that can be hermetically sealed, a slit valve disposed at the front of the chamber for placing the chamber in communication with another chamber, a door disposed at the back of the chamber so as to allow a wafer cassette to be introduced into the chamber. In addition to having at least one of the load-locks, the semiconductor manufacturing equipment includes a transfer chamber to which the load-lock is connected, at least one process chamber connected to the transfer chamber, and an exhaust system by which each load-lock chamber is evacuated. The wafer anti-contamination measure may be an anti-eddy cover that covers the open back of a wafer cassette when the cassette is supported in the load-lock chamber. Alternatively, the wafer anti-contamination measure may be ductwork of the exhaust system that extends vertically along the door and/or rear wall of the load-lock chamber.
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Rodriguez Saul J.
Rudawitz Joshua I
Samsung Electronics Co,. Ltd.
Volentine & Whitt PLLC
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