Load-lock unit and wafer transfer system

Details Load-lock unit and wafer transfer system Load-lock unit and wafer transfer system

1992-03-26

1995-04-11

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414936, 414939, 414225, 414416, 414757, 414937, 901 47, 118719, 356400, 364559, H01L 2100

Patent

active

054052300

ABSTRACT:
A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same atmosphere as or a similar atmosphere to the second atmosphere, and is opened to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a storing device, disposed in the load-lock chamber, for storing a plurality of wafers vertically at a gap, a holding mechanism for holding one of the plurality of wafers stored in the storing device, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting device for detecting the positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.

REFERENCES:
patent: 4457664 (1984-07-01), Judell et al.
patent: 4553069 (1985-11-01), Purser
patent: 4752898 (1988-06-01), Koenig
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4880348 (1989-11-01), Baker et al.
patent: 4917556 (1990-04-01), Stork et al.
patent: 4973217 (1990-11-01), Engelbrecht
patent: 5004924 (1991-04-01), Imahashi
patent: 5054991 (1981-10-01), Kato
patent: 5102280 (1992-04-01), Poduje et al.

Affiliated with

Also associated with

Rating

Load-lock unit and wafer transfer system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Load-lock unit and wafer transfer system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Load-lock unit and wafer transfer system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1534667