Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1989-12-14
1992-09-15
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414221, 414750, 118719, 118500, 20429825, 104168, C23C 1308
Patent
active
051471680
ABSTRACT:
A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have substrates detachably mounted thereon, an exhaust port to evacuate the chamber to a vacuum, a gas inlet port to introduce a gas to bring the evacuated chamber back to atmospheric pressure, a rectifying plate provided in the chamber adjacent to and at a predetermined distance away from the substrate holder on that side of the substrate holder upon which the substrates are detachably mounted, and a gas introduction pipe having a gas ejection outlet in said chamber for introducing additional gas in a space defined by the predetermined distance to flow along the surfaces of the substrates and the substrate holder.
REFERENCES:
patent: 4042128 (1977-08-01), Shrader
patent: 4274936 (1981-06-01), Love
patent: 4749465 (1988-06-01), Flint et al.
patent: 4832981 (1989-05-01), Yamazaki
Hirano Hiroyuki
Naruse Humio
Ono Shin-ichi
Suwa Hidenori
Nihon Shinku Gujutsu Kabushiki Kaisha
Werner Frank E.
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