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Apparatus for processing semiconductors

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus for storing and moving a cassette

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Apparatus for synchronizing loading and unloading of substrates

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus for the continuous feeding of material to be melted

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus for the quasi-continuous treatment of substrates

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus for transfer of workpieces into and out of a coating c

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus for vacuum treating two dimensionally extended...

Material or article handling – Apparatus for moving material between zones having different...
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Apparatus on the carousel principle for the coating of substrate

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Article transfer system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Atmospheric rotary feed and discharge turret valve and method

Material or article handling – Apparatus for moving material between zones having different... – Including trap chamber having horizontal axis of rotation
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Atmospheric wafer transfer module with nest for wafer...

Material or article handling – Apparatus for moving material between zones having different...
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Auger airlock assembly having product cutting knife

Material or article handling – Apparatus for moving material between zones having different... – Including screw conveyor
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Automated door assembly for use in semiconductor wafer...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Automated opening and closing of ultra clean storage containers

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Automated semiconductor processing system

Material or article handling – Apparatus for moving material between zones having different...
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Automated wafer buffer for use with wafer processing equipment

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Automated wafer transfer system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Automatic apparatus for continuous treatment of leaf materials w

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Batchloader for load lock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Bellows isolation for index platforms

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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