Apparatus for synchronizing loading and unloading of substrates

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

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414223, 414939, B65G 2900

Patent

active

054073146

ABSTRACT:
Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and unloading substrates, a second station where substrates are coated, a rotatable substrate holder for transferring substrates stepwise between stations, and first and second lifters for lifting substrates from the rotatable holder at respective first and second stations. A rotating cylinder has timing grooves in its cylindrical surface which guide pins on the bottom of a shaft fixed to the substrate holder in order to move it stepwise between stations. Timing grooves in opposed ends of the cylinder guide pins which move the lifters vertically during pauses between stepwise movements. A single motor thus controls all movements in the coating chamber.

REFERENCES:
patent: 3874525 (1975-04-01), Hassan et al.
patent: 3973665 (1976-08-01), Giammanco
patent: 4027767 (1977-06-01), Gluck
patent: 4318767 (1982-03-01), Hijikata et al.
patent: 4465416 (1984-08-01), Burkhalter et al.
patent: 4674621 (1987-06-01), Takahashi
patent: 4735548 (1988-04-01), Kimata et al.
patent: 4820106 (1989-04-01), Walde et al.
patent: 4969790 (1990-11-01), Petz et al.
patent: 5085312 (1992-02-01), Ribordy et al.
patent: 5112469 (1992-05-01), Kempf et al.
patent: 5135635 (1992-08-01), Ikeda
Droscha, Helmut: Vollautomatisches Handling Hochempfindlicher Massenteile . . . , Deutsche Helse und Fordentechnik Nov. 1976, pp. 21-23.
Bettinelli, "Indexing and Transfer" (product brochure.

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