Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1993-10-01
1995-04-18
Huppert, Michael S.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414223, 414939, B65G 2900
Patent
active
054073146
ABSTRACT:
Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and unloading substrates, a second station where substrates are coated, a rotatable substrate holder for transferring substrates stepwise between stations, and first and second lifters for lifting substrates from the rotatable holder at respective first and second stations. A rotating cylinder has timing grooves in its cylindrical surface which guide pins on the bottom of a shaft fixed to the substrate holder in order to move it stepwise between stations. Timing grooves in opposed ends of the cylinder guide pins which move the lifters vertically during pauses between stepwise movements. A single motor thus controls all movements in the coating chamber.
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Droscha, Helmut: Vollautomatisches Handling Hochempfindlicher Massenteile . . . , Deutsche Helse und Fordentechnik Nov. 1976, pp. 21-23.
Bettinelli, "Indexing and Transfer" (product brochure.
Huppert Michael S.
Keenan James W.
Leybold Aktiengesellschaft
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