Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1995-06-27
1998-08-11
Brahan, Thomas J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414941, 901 45, B65G 4780
Patent
active
057918511
ABSTRACT:
A pivot arm (3) is rotatable about an axis for delivering and removing a flat workpiece (24) into and out of the area of the lock (19) of an evacuable coating chamber (26). The pivot arm (3) is provided at its distal end with the retaining bolt (12) which is perpendicular to the plane (20) of the lock opening (19) and attached to a central part of a flexible diaphragm. The diaphragm is substantially parallel to the sealing surface of a workpiece carrier (16) and is fixed around its outer radial edge to the workpiece carrier so that the workpiece carrier (16) is able to tilt slightly during its vertical closing motion.
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Kempf Stefan
Konig Michael
Balzers Und Leybold Aktiengesellschaft
Brahan Thomas J.
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