Automated wafer transfer system

Details Automated wafer transfer system Automated wafer transfer system

1997-06-19

1999-07-20

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, 414940, B65G 4907

Patent

active

059248335

ABSTRACT:
An automated system is presented for containerless transfer of semiconductor wafers through a wall separating a first fabrication area and a second fabrication area. The system includes multiple containers for transporting the wafers, one or more air lock chambers, mass transfer systems, robotic arms, stock areas, and a control system. The containers (e.g., wafer boats) are dispersed between the first and second fabrication areas. A portion of the containers contain at least one semiconductor wafer, and the remainder of the containers are empty. The air lock chambers are positioned in sealed openings in the wall. The air lock chambers provide isolation between the first and second fabrication areas while permitting the transfer of semiconductor wafers between the fabrication areas. A mass transfer system is positioned within each air lock chamber and allows for containerless transfer of wafers through the air lock chamber. The stock areas provide storage areas for containers adjacent to each air lock chamber. The robotic arms are used to move the containers between the stock areas and each air lock chamber. The control system governs the dispersal of containers and the operations of the air lock chambers, the mass transfer systems, the robotic arms, and the stock areas.

REFERENCES:
patent: 4923352 (1990-05-01), Tamura et al.
patent: 4964776 (1990-10-01), Wakita et al.
patent: 5024570 (1991-06-01), Kiriseko et al.
patent: 5033927 (1991-07-01), Pelissier
patent: 5139459 (1992-08-01), Takahashi et al.
patent: 5163832 (1992-11-01), Ishii et al.
patent: 5303214 (1994-04-01), Kulakowski et al.
patent: 5451131 (1995-09-01), Hecht et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5658123 (1997-08-01), Goff et al.
patent: 5664925 (1997-09-01), Muka et al.
patent: 5730573 (1998-03-01), Masujima et al.
patent: 5751581 (1998-05-01), Tau et al.
patent: 5772386 (1998-06-01), Mages et al.

Affiliated with

Also associated with

Rating

Automated wafer transfer system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automated wafer transfer system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated wafer transfer system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1316184