Article transfer system

Details Article transfer system Article transfer system

1986-06-30

1988-02-02

Falk, Joseph

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

B65G 2500

Patent

active

047226544

ABSTRACT:
A load lock chamber is secured to a Rutherford Backscattering Spectrometer in communication with the spectrometer chamber. A valve separates the two chambers. A specimen manipulator transfers a specimen attached to a transfer member to a specimen support in the spectrometer chamber. The transfer member is releasably attached to the manipulator and to the specimen support for simplifying transfer of the specimen. The vacuum of the spectrometer is always maintained by evacuating the load lock chamber before transfer of the specimen in and out of the spectrometer chamber.

REFERENCES:
patent: 2317729 (1943-04-01), Bruno
patent: 3272347 (1966-09-01), Lemelson
patent: 3851543 (1974-12-01), Krom
patent: 4400856 (1983-08-01), Tseng
patent: 4516435 (1985-05-01), Outlaw et al.
patent: 4520550 (1985-06-01), Dunn et al.
patent: 4542712 (1985-09-01), Sato et al.
patent: 4605469 (1986-08-01), Shih et al.
patent: 4643627 (1987-02-01), Bednorz et al.

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