Apparatus for the quasi-continuous treatment of substrates

Details Apparatus for the quasi-continuous treatment of substrates Apparatus for the quasi-continuous treatment of substrates

1988-01-11

1990-01-09

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414225, 414404, 414416, B65G 4906, F27D 312

Patent

active

048924512

ABSTRACT:
In an apparatus for the treatment of substrates supplied in cassettes, with a series of lock chambers and treatment chambers, with a transport system for transporting at least one substrate holder through the chambers, and with a loading station, the problem of loading the apparatus with substrates from a moving belt without the need to hold the substrates in form-fitting mountings is solved as follows: (a) the substrate holders are constructed so as to hold one substrate at a time at an acute angle to a vertical plane, and (b) the loading station has a means for shifting at least one cassette and a manipulator system whereby the movements of extracting the substrate from the cassette and inserting it into the cassette can be performed in the perpendicular direction and whereby the substrate can be brought by a rotation of 90 degrees into a slanting position which corresponds substantially to the position of the receiving plane of the substrate.

REFERENCES:
patent: 3997065 (1976-12-01), Saksch
patent: 4500407 (1985-02-01), Boys et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4749465 (1988-06-01), Flint et al.

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