Apparatus for processing semiconductors

Details Apparatus for processing semiconductors Apparatus for processing semiconductors

1991-10-08

1993-01-26

Hart, Charles

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

55 96, 553852, 55472, 454187, B65G 2500

Patent

active

051818191

ABSTRACT:
A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an air intake port, an air otlet port and an air blower, the air intake port of each filter unit communicating with the air outlet ports of the filter units disposed upstream side of the air passage, and a mechanism for arranging articles to be processed close to the air outlet port of each filter unit such that air is supplied to the articles to be processed after the air has passed through the corresponding filter units.

REFERENCES:
patent: 3944405 (1976-03-01), Van Calsteren et al.
patent: 4693173 (1987-09-01), Saiki et al.
patent: 4832717 (1989-05-01), Peters
patent: 4923352 (1990-05-01), Tamuya et al.
patent: 5042997 (1991-08-01), Rhodes
patent: 5059079 (1991-10-01), Foulke et al.
patent: 5064337 (1991-11-01), Asakawa et al.

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