Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1998-04-22
2000-06-27
Bratlie, Steven A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414267, 414939, 414940, B65G 6500, B65G 4907
Patent
active
060799277
ABSTRACT:
An automated wafer buffer is provided for use with a wafer processing system. The wafer buffer includes an I/O port for loading and unloading wafer containers, each holding a batch of wafers, a storage structure for storing up to a predetermined number of wafer containers and a container port for holding at least one wafer container during transfer of wafers to and between the wafer container and the processing system. A container transfer mechanism transfers the wafer containers to and between the I/O port, the storage structure and the container port. A wafer transfer mechanism transfers wafers to and between a wafer container at the container port and the processing system.
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Bratlie Steven A.
Varian Semiconductor Equipment Associates Inc.
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