Batchloader for load lock

Details Batchloader for load lock Batchloader for load lock

1997-01-27

1997-09-09

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414937, 414939, B65G 4907

Patent

active

056649258

ABSTRACT:
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier, for example, used for supporting and transporting a plurality of the wafers in spaced, stacked, relationship. The carrier is supported adjacent a chamber within the load lock. A multilevel end effector associated with the load lock chamber includes a plurality of spaced end effector sets, each set being adapted to support a wafer thereon and aligned with an associated wafer supported in the carrier. The plurality of wafers are engaged and simultaneously retrieved as a grouping, then held in the load lock chamber for subsequent transport, for example, one at a time, into an adjacent transport chamber for delivery to a specified one of a plurality of processing stations. A mini-environment may sealingly isolate the load lock chamber and the interior of the carrier from the surrounding atmosphere. Mechanisms are provided for moving the end effector sets, both elevationally and into and out of the load lock chamber, and for moving a load lock door between a closed, sealed, position and an open position and to a parked position remote from the region adjacent the load lock chamber.

REFERENCES:
patent: 4381965 (1983-05-01), Maher, Jr. et al.
patent: 4550242 (1985-10-01), Uehara et al
patent: 4674936 (1987-06-01), Bonora
patent: 4674939 (1987-06-01), Maney et al.
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4715921 (1987-12-01), Maher et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4730976 (1988-03-01), Davis et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4802809 (1989-02-01), Bonora et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5133284 (1992-07-01), Thomas et al.
patent: 5166884 (1992-11-01), Maney et al.
patent: 5169272 (1992-12-01), Bonora et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5570994 (1996-11-01), Thompson et al.
patent: 5590996 (1997-01-01), Somekh et al.

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