Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2007-07-17
2007-07-17
Mackey, Patrick (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S939000
Reexamination Certificate
active
10713339
ABSTRACT:
A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least one workpiece pass-through opening with an atmosphere outside the vacuum transport chamber and the processing arrangement. One single loadlock and processing tower is formed by the processing arrangement and the loadlock arrangement being arranged vertically on upon the other.
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Bocko & Mitchell, AMLCD Glass Substrates-Foundation for High-Tech Displays, The GlassResearcher, vol. 12 No. 1 & 2, p. 26-29, 2002-2003.
Buechel Arthur
Elyaakoubi Mustapha
Ostermann Rainer
Greenhut Charles
Mackey Patrick
OC Oerlikon Balzers AG
Pearne & Gordon LLP
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