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Method in etching of a substrate

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Method of adjusting natural frequency of dual-axis vibratory str

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method of adjusting the flatness of a slider using selective...

Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate
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Method of adjusting the thickness of an electrode in a...

Etching a substrate: processes – Forming or treating electrical conductor article
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Method of aligning a nozzle plate with a mask

Etching a substrate: processes – Forming or treating thermal ink jet article
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Method of aligning nanotubes and wires with an etched feature

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of and apparatus for chemical mechanical polishing...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method of and apparatus for detecting and controlling in...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method of and apparatus for removing coating from edge of substr

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
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Method of and apparatus for tailoring an etch profile

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method of and apparatus for tribochemically finishing ceramic wo

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method of anisotropic etching of silicon

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Method of anti-stiction dimple formation under MEMS

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method of ashing resist and apparatus therefor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method of ashing semiconductor device having metal...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method of avoiding plasma arcing during RIE etching

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Method of balancing a display panel substrate

Etching a substrate: processes – Forming or treating a sign or material useful in a sign
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Method of bonding and transferring a material to form a...

Etching a substrate: processes – Adhesive or autogenous bonding of two or more...
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Method of checking the accuracy of the result of a multistep etc

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method of chemical mechanical polishing for dielectric layers

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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