Method of and apparatus for removing coating from edge of substr

Details Method of and apparatus for removing coating from edge of substr Method of and apparatus for removing coating from edge of substr

1996-03-08

1997-11-18

Breneman, R. Bruce

Etching a substrate: processes

Nongaseous phase etching of substrate

Projecting etchant against a moving substrate or controlling...

216 83, 1566401, 156345, 134 32, 134 33, H01L 2130, B05D 300, B44C 122

Patent

active

056884117

ABSTRACT:
A removing unit for removing coating from the edge of a substrate has a vertical unit body housing a pair of pipes connected to a solvent reservoir and having respective solvent supply parts. The unit body has a head disposed in an upper end portion thereof. The head has a horizontal slot which opens at opposite ends thereof and at one side thereof for receiving an edge of a substrate. Solvent is supplied into the slot, drawn therealong and discharged from an end of the slot, all in a contained manner. A edge of a substrate is horizontally inserted into the slot so as to be immersed in the solvent contained in the slot, and the unit body is moved along the substrate edge so that the solvent cleans undesired coating from the edge.

REFERENCES:
patent: 4439244 (1984-03-01), Allevato
patent: 4510176 (1985-04-01), Cuthbert et al.

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