Method of adjusting natural frequency of dual-axis vibratory str

Details Method of adjusting natural frequency of dual-axis vibratory str Method of adjusting natural frequency of dual-axis vibratory str

1996-05-21

1998-09-08

Breneman, R. Bruce

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

437228, H01L 22027

Patent

active

058040870

ABSTRACT:
There is provided a method of adjusting the natural frequency of a dual-axis vibratory structure having: a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force; a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and a mass portion, the method comprising the steps of: measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating the measuring step and the thickness varying step until the natural frequency of the first and third axes directions are within the scope of a permissible error. The method can be adjusted to coincide the natural frequency of the vibratory structure with a design value, so that linearity and the sensitivity of a sensor are improved and operation bandwidth increases.

REFERENCES:
patent: 4699006 (1987-10-01), Boxenhorn
patent: 5490420 (1996-02-01), Burdess
patent: 5507911 (1996-04-01), Greiff

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