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Method and apparatus for regenerating an etch solution

Etching a substrate: processes – Nongaseous phase etching of substrate – Recycling – regenerating – or rejunevating etchant
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Method and apparatus for regenerating etching liquid

Etching a substrate: processes – Nongaseous phase etching of substrate – Recycling – regenerating – or rejunevating etchant
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Method and apparatus for rejuvenating polishing slurry

Etching a substrate: processes – Nongaseous phase etching of substrate – Recycling – regenerating – or rejunevating etchant
Reexamination Certificate

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Method and apparatus for removing a halogen-containing residue

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for removing coating layers from...

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
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Method and apparatus for removing native oxide layers from...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for repairing defect on plane surface of ph

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and apparatus for restricting process fluid flow...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Method and apparatus for retaining an internal coating...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is reusable
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Method and apparatus for semiconductor memory

Etching a substrate: processes – Forming or treating electrical conductor article – Adhesive or autogenous bonding of self-sustaining preforms
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Method and apparatus for shaping gas profile near bevel edge

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for simulating standard test wafers

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for simulating standard test wafers

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for smoothing thin conductive films by...

Etching a substrate: processes – Planarizing a nonplanar surface
Reexamination Certificate

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Method and apparatus for stabilizing a plasma

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Method and apparatus for stone engraving

Etching a substrate: processes – Forming or treating an ornamented article – Treating stone
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Method and apparatus for stopping mechanical and chemical-mechan

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Patent

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Method and apparatus for structuring printed circuit boards

Etching a substrate: processes – Forming or treating electrical conductor article
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Method and apparatus for surface conditioning

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for surface processing of printed...

Etching a substrate: processes – Forming or treating electrical conductor article
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