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Selective etching of thin films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Selective etching processes of SiO 2 , Ti and In 2 O 3...

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Selective etching processes of SiO 2 , Ti and In 2 O 3...

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Selective formation of porous silicon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
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Selective nitride: oxide anisotropic etch process

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Selective removal of dielectric materials and plating...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Selective removal of material by irradiation

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Selective seed and plate using permanent resist

Etching a substrate: processes – Forming groove or hole in a substrate which is subsequently...
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Selective treatment of the surface of a microelectronic...

Etching a substrate: processes – Forming or treating electrical conductor article
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Selectively etching silicon using fluorine without plasma

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Self aligned contact etch using difluoromethane and trifluoromet

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Self stop aluminum pad for copper process

Etching a substrate: processes – Planarizing a nonplanar surface
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Self-aligned construction and manufacturing process for monolith

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Self-aligned micro hinges

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Self-aligned process for capping copper lines

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Self-aligned process for fabricating imprint templates...

Etching a substrate: processes – Nongaseous phase etching of substrate
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Self-alignment scheme for enhancement of CPP-GMR

Etching a substrate: processes – Forming or treating article containing magnetically...
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Self-cleaning colloidal slurry composition and process for...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Self-cleaning etch process

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Self-cleaning etch process

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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