Etching a substrate: processes – Nongaseous phase etching of substrate
Reexamination Certificate
2007-03-29
2009-06-16
Vinh, Lan (Department: 1792)
Etching a substrate: processes
Nongaseous phase etching of substrate
C216S026000, C216S067000, C438S745000
Reexamination Certificate
active
07547398
ABSTRACT:
A process that enables coplanarization of the structures that have been created in multiple independent etch steps. The various etches are performed independently by selectively exposing only certain patterns to particular etching conditions. After these structures have been created, it is possible that the various structures will exist at different planes/elevations relative to the template surface. The elevations of the various structures may be adjusted independently by selectively exposing “higher” structures to an anisotropic etch that reduces the overall elevation of the structures, while preserving the structural topography.
REFERENCES:
patent: 3503538 (1970-03-01), Barnes
patent: 4022855 (1977-05-01), Hamblen
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4208240 (1980-06-01), Latos
patent: 4364971 (1982-12-01), Sack et al.
patent: 4440804 (1984-04-01), Milgram
patent: 4512848 (1985-04-01), Deckman et al.
patent: 4521445 (1985-06-01), Nablo et al.
patent: 4552832 (1985-11-01), Blume et al.
patent: 4576900 (1986-03-01), Chiang
patent: 4637904 (1987-01-01), Rounds
patent: 4676868 (1987-06-01), Riley et al.
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4731155 (1988-03-01), Napoli et al.
patent: 4737425 (1988-04-01), Lin et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4862019 (1989-08-01), Ashmore, Jr.
patent: 4866307 (1989-09-01), Ashmore, Jr.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4909151 (1990-03-01), Fukui et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4932358 (1990-06-01), Studley et al.
patent: 4936465 (1990-06-01), Zold
patent: 4957663 (1990-09-01), Zwiers et al.
patent: 4959252 (1990-09-01), Bonnebat et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4980316 (1990-12-01), Huebner
patent: 5003062 (1991-03-01), Yen
patent: 5028361 (1991-07-01), Fujimoto
patent: 5028366 (1991-07-01), Harakal et al.
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5073230 (1991-12-01), Maracas et al.
patent: 5110514 (1992-05-01), Soane
patent: 5124089 (1992-06-01), Ohkoshi et al.
patent: 5126006 (1992-06-01), Cronin et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5212147 (1993-05-01), Sheats
patent: 5232874 (1993-08-01), Rhodes et al.
patent: 5240550 (1993-08-01), Boehnke et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5246880 (1993-09-01), Reele et al.
patent: 5250472 (1993-10-01), Chen et al.
patent: 5259926 (1993-11-01), Kuwabara et al.
patent: 5277749 (1994-01-01), Griffith et al.
patent: 5288436 (1994-02-01), Liu et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5348616 (1994-09-01), Hartman et al.
patent: 5357122 (1994-10-01), Okubora et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5362940 (1994-11-01), MacDonald et al.
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5371822 (1994-12-01), Horwitz et al.
patent: 5374327 (1994-12-01), Imahashi et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5425848 (1995-06-01), Haisma et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5434107 (1995-07-01), Paranjpe
patent: 5445195 (1995-08-01), Kim
patent: 5449117 (1995-09-01), Muderlak et al.
patent: 5451435 (1995-09-01), Yu
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercuio
patent: 5468542 (1995-11-01), Crouch
patent: 5480047 (1996-01-01), Tanigawa et al.
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5542605 (1996-08-01), Campau
patent: 5545367 (1996-08-01), Bae et al.
patent: 5601641 (1997-02-01), Stephens
patent: 5612068 (1997-03-01), Kempf et al.
patent: 5628917 (1997-05-01), MacDonald et al.
patent: 5643364 (1997-07-01), Zhao et al.
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5669303 (1997-09-01), Maracas et al.
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5753014 (1998-05-01), Van Rijn
patent: 5772905 (1998-06-01), Chou
patent: 5776748 (1998-07-01), Singhvi et al.
patent: 5804474 (1998-09-01), Sakaki et al.
patent: 5812629 (1998-09-01), Clauser
patent: 5817579 (1998-10-01), Ko et al.
patent: 5820769 (1998-10-01), Chou
patent: 5843363 (1998-12-01), Mitwalsky et al.
patent: 5849209 (1998-12-01), Kindt-Larsen et al.
patent: 5849222 (1998-12-01), Jen et al.
patent: 5858580 (1999-01-01), Wang et al.
patent: 5888650 (1999-03-01), Calhoun et al.
patent: 5895263 (1999-04-01), Carter et al.
patent: 5900160 (1999-05-01), Whitesides et al.
patent: 5907782 (1999-05-01), Wu
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 5956216 (1999-09-01), Chou
patent: 5974150 (1999-10-01), Kaish et al.
patent: 5983906 (1999-11-01), Zhao et al.
patent: 6046056 (2000-04-01), Parce et al.
patent: 6048799 (2000-04-01), Prybyla
patent: 6067144 (2000-05-01), Murouchi
patent: 6074827 (2000-06-01), Nelson et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6180239 (2001-01-01), Whitesides et al.
patent: 6218316 (2001-04-01), Marsh
patent: 6242363 (2001-06-01), Zhang
patent: 6245213 (2001-06-01), Olsson et al.
patent: 6258661 (2001-07-01), Furukawa et al.
patent: 6274294 (2001-08-01), Hines
patent: 6309580 (2001-10-01), Chou
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6334960 (2002-01-01), Willson et al.
patent: 6337262 (2002-01-01), Pradeep et al.
patent: 6348999 (2002-02-01), Summersgill et al.
patent: 6355198 (2002-03-01), Kim et al.
patent: 6376379 (2002-04-01), Quek et al.
patent: 6379573 (2002-04-01), Kim et al.
patent: 6383928 (2002-05-01), Eissa
patent: 6387330 (2002-05-01), Bova et al.
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6388253 (2002-05-01), Su
patent: 6391217 (2002-05-01), Schaffer et al.
patent: 6391798 (2002-05-01), DeFelice et al.
patent: 6423207 (2002-07-01), Heidari et al.
patent: 6482742 (2002-11-01), Chou
patent: 6495907 (2002-12-01), Jain et al.
patent: 6498640 (2002-12-01), Ziger
patent: 6503829 (2003-01-01), Kim et al.
patent: 6514672 (2003-02-01), Young et al.
patent: 6517977 (2003-02-01), Resnick et al.
patent: 6517995 (2003-02-01), Jacobson et al.
patent: 6518189 (2003-02-01), Chou
patent: 6521536 (2003-02-01), Robinson
patent: 6534418 (2003-03-01), Plat et al.
patent: 6541360 (2003-04-01), Plat et al.
patent: 6565928 (2003-05-01), Sakamoto et al.
patent: 6580172 (2003-06-01), Mancini et al.
patent: 6586268 (2003-07-01), Kopola et al.
patent: 6593240 (2003-07-01), Page
patent: 6621960 (2003-09-01), Wang et al.
patent: 6623579 (2003-09-01), Smith et al.
patent: 6627544 (2003-09-01), Izumi et al.
patent: 6629292 (2003-09-01), Corson et al.
patent: 6632742 (2003-10-01), Yang et al.
patent: 6635581 (2003-10-01), Wong
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6665014 (2003-12-01), Assadi et al.
patent: 6677252 (2004-01-01), Marsh
patent: 6678038 (2004-01-01), Binnard
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6713238 (2004-03-01), Chou et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6776094 (2004-08-01), Whitesides et al.
patent: 6809356 (2004-10-01), Chou
patent: 6828244 (2004-12-01), Chou
patent: 6833325 (2004-12-01), Huang et al.
patent: 6849558 (2005-02-01), Schaper
patent: 6870301 (2005-03-01), Choi et al.
patent: 6873087 (2005-03-01), Choi et al.
patent: 6879162 (2005-04-01), Aguero et al.
patent: 6900881 (2005-05-01), Sreenivasan et al.
patent: 6908861 (2005-06-01), Sreenivasan et al.
patent: 6916584 (2005-07-01), Sreenivasan et al.
patent: 6916585 (2005-07-01), Sreenivasan et al.
patent: 6932934 (2005-08-01), Choi et al.
patent: 6946360 (2005-09-01), Chou
patent: 6955767 (2005-10-01), Chen
patent: 6964793 (2005-11-01), Willson et al.
patent: 6994808 (2006-02-01), Lee et al.
patent: 7029944 (2006-04-01), Conley et al.
patent: 7071088 (2006-
Myron Lawrence J.
Resnick Douglas J.
Schmid Gerard M.
Stacey Nicholas A
Voisin Ronald D.
Fish & Richardson P.C.
Molecular Imprints, Inc.
Vinh Lan
Wood Laura C.
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